LIP 481V / LIP 481U

    Specifications

    Specifications

    LIP 481 V

    LIP 481 U

    Area of application

    High vacuum, up to 10–7 mbar

    Ultrahigh vacuum, up to 10–11 mbar

    Measuring standard*

    Coefficient of linear expansion

    DIADUR phase grating on glass or Zerodur glass ceramic

    Glass: αtherm  8 · 10–6 K–1; Zerodur glass ceramic: αtherm  (0 ± 0.1) x 10–6 K–1

    Accuracy grade*

    ± 1 µm, ± 0.5 µm

    Position error

    within one signal period

    ± 0.02 µm

    Measuring length ML* in mm

    70 120 170 220 270 320 370 420

    Reference marks

    One at midpoint of measuring length

    Output signals

      1 VPP

    Signal period

    2 µm

    Cutoff frequency –3 dB

    300 kHz

    Traversing speed

    36 m/min

    Power supply

    Current consumption

    5 V DC ± 5%

    < 190 mA

    Electrical connection

    D-sub connector (male) 15-pin, interface electronics integrated in the connector

    Housing lead-through* (see page 4)

    • None (interface electronics in vacuum)
    • High-vacuum compatible (interface electronics outside of vacuum)

    D sub (not included in delivery, interface electronics outside of vacuum)

    Cable length of scanning head to APE*

    • 0.5 m or 1 m
    • 0.5 m or 1 m to the housing lead-through and 0.5 m to the APE

    0.5 m or 1 m to the housing lead-through and 0.5 m to the APE

    Other cable lengths on request, but 3 m between scanning head and APE

    Cable length after APE

    20 m (with HEIDENHAIN cable)

    Vibration 55 to 2 000 Hz

    Shock 11 ms

    200 m/s2 (EN 60 068-2-6)

    500 m/s2 (EN 60 068-2-27)

    Operating temperature

    0 °C to 40 °C

    Bake-out temperature

    100 °C

    120 °C

    Materials

    PCB: Ceramic

    Adhesives: UHV-compatible, temperature resistant

    Weight Scanning head

    Connector

    Scale

    Connecting cable

    50 g (without cable)

    32 g, with integrated interface electronics: 140 g

    5.6 g + 0.2 g/mm measuring length

    38 g/m

    * Please select when ordering