LIP/LIF series for application in high and ultrahigh vacuum technology

TypBasline errorSubstrate and mountingInterpolation errorMeasuring length
Accuracy
grade
Interval
LIP 481V
LIP 481U
± 0.5 μm
± 1 μm

≤ ± 0.175 μm/ 5 mm

Scale of Zerodur glass ceramic or glass with fi xing clamps

± 7 nm70 mm to 420 mm
LIF 481V± 3 μm≤ ± 0.225 μm/ 5 mm ± 12 nm70 mm to 1020 mm
LIC 4113 V
LIC 4193 V
±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm≤ ±0.275 µm/10 mm METALLUR scale grating on glass ceramic or glass± 20 nm240 mm to 3040 mm